The types and quantities of equipment in a fab are related to the fab’s production capacity, process node, product type, and level of automation. Today, we will provide a detailed introduction to the standard required equipment. Here, I will categorize the equipment into process equipment, inspection and metrology equipment, and facility equipment.
Process Equipment: Includes wet process, dry process, and photolithography.
Wet process includes: wafer electroplating machines, cleaning machines, wet etchers, CMP, wet resist strippers, spin dryers, etc.
Dry Process Equipment
Deposition:
Evaporation systems, sputtering systems, pulsed laser deposition (PLD), plasma-enhanced CVD (PECVD), low-pressure CVD (LPCVD), metal-organic CVD (MOCVD), microwave plasma CVD (MPCVD), laser CVD, atmospheric pressure CVD (APCVD), high-temperature CVD (HT-CVD), ultra-high vacuum CVD (UHV CVD), etc.
Dry Etching:
Ion beam etching (IBE), ICP-RIE, CCP-RIE, ECR-RIE, DRIE, dry resist strippers, etc.
Epitaxy tools, ion implanters
Annealing:
Furnace tube annealing systems, rapid thermal annealing (RTA) systems, laser annealing systems, plasma annealing systems
Diffusion:
Furnace tube systems
Photolithography Equipment:
Photolithography systems, spin coaters, developers, etc.
Inspection and Metrology Equipment
Optical microscopes, scanning electron microscopes (SEM), atomic force microscopes (AFM), ellipsometers, probers, AOI, XRD, FIB, XPS, SIMS, TEM, four-point probes, etc.
Facility Equipment
Filtration Systems:
HEPA (High Efficiency Particulate Air) and ULPA (Ultra-Low Penetration Air) filters
Temperature and Humidity Control Systems:
Dehumidifiers, humidifiers, chillers, heat exchangers, cooling towers, etc.
Gas Supply Systems:
Air compressors, nitrogen generators, etc.
Exhaust Gas Treatment Systems:
Dry/wet scrubbers, combustion towers, catalytic towers
Water Treatment Systems:
Ultrapure water systems and wastewater treatment systems
Fire Protection Systems:
Automatic fire suppression systems, smoke detectors, and alarm systems
Wafer Handling Systems:
OHT (Overhead Hoist Transport), AGV (Automated Guided Vehicle), RGV (Rail Guided Vehicle), etc.
Storage Systems:
Stockers, buffers, etc.
Related:
- Wafer Wet Cleaning: Required Nitrogen Purity Levels
- Why ESC Surface Treatment Drives Real Performance?
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